AG40 ion gun
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►The long-lived Yttrium coated iridium filament makes the source suitable for inert and reactive gases. In order to minimize the pressure increase, the gas is fed directly into the ionization chamber through a separate DN16CF flange. Typically, the pressure in the UHV chamber remains in the 10-5 to 10-6 mbar range during operation.
►The IQE 11/35 generates an ion current of 10-15 µA (Argon) with a Gaussian beam profile. The beam diameter and current density depend on the source-to-sample distance, which can be optimized by choosing one of the standard insertion length (62.5 mm, 120 mm, 190 mm, 250 mm) or a customized length.
►The source is bakeable up to 250° C and can be cleaned by internal "degassing".For operation of the source, a digital COSCON IS power supply allows computer control in the higher energy range up to 5 kV.
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能量范围200 ~ 3000 eV,连续可调
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束流大小最高 20 μA @ Ar+
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光斑尺寸约5 mm @ 3KV, 工作距离 = 30mm 约10 mm @ 3KV, 工作距离 = 60mm
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束流密度约250 μA/cm2 @ 3KV, 工作距离 = 30mm 约70 μA/cm2 @ 3KV, 工作距离 = 60mm
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适用气体多种气体,常用于Ar气
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安装法兰DN40CF
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插入长度62.5mm 至 250mm,可定制
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烘烤温度250°C
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远程控制选配;RS485通讯协议