μ-CHAMBER

The chamber body is made from 316L stainless steel with an outer diameter of 306 mm.

Port lengths can be kept shorter which is beneficial for the field of view

 

 

 

The magnetic shielding is provided by inner mu-metal liners, either single or double depending on the requirements on the residual magnetic fields

 

 

 

Our chamber shielding design ensures optimal magnetic shielding for the analyser

 

 

 

 

 

 

 

 

 

 

 

SPECIFICATIONS

Magnetic shielding structure

Chamber structure

 

 

 

 

 

 

Leak rate

Residual magnetic field

 

 

 

 

 

 

 

Suitable analyser types

Bakeout temp

Single liner

Double liner

 

Pure μ-metal+316L stainless steel chamber+μ-metal shields

Standard model or customized

 

 

 

 

 

 

≤ 1×10-10 mbar*L /s

≤5mGauss guaranteed;≤1mGauss achievable

 

 

 

 

 

 

 

R200D

< 200 °C (*)

< 0.5 µT

< 0.1 µT

 

Operation

Performance

Mounting

* The data on this page is measured by Csi-Lab.