Mini-XY-Stage

The Mini-XY-Stage provides basic X & Y manipulation for low duty-cycle applications where high precision isn’t required.

SPECIFICATIONS

Sealing mechanism

Clear bore

XY stroke

Typical repeatability

Maxium Load

Leak rate

Mounting flange

Pressure range

Bakeout temperature

Bellows

38mm

+/-10mm

0.5mm

Vertical axis: 100 N; Horizontal axis: 10 Nm

< 1E -11 mbar*L*s-1

One side CF35 threaded holes, the other side CF35 clear holes

1E-11mbar to 1000mbar

250℃

* The data on this page is measured by Csi-Lab.

Basic X & Y manipulation for low duty-cycle applications

Fully adjustable mounting orientation