Liner actuators

Linear Shift Mechanisms (LSMs) provide linear motion along the port axis (Z). Typical applications include the positioning of beamline filters, adjustment of sputter

sources and deposition stages through to production style applications.

SPECIFICATIONS

Type

Sealing mechanism

Stroke range

Clear bore

Leak rate

Mounting flange

Pressure range

Operating temperature

Bakeout temperature

CLSM35-100-H | LSM35-100-S

Bellows

100 mm

38mm

< 1E -11 mbar*L*s-1

Dual-sided CF35-tapped holes

1E-11mbar to 1000mbar

-20°C  to  150°C

200℃

* The data on this page is measured by Csi-Lab.

Compact design

Smooth kinematic motion

Reliable and rigid construction

True UHV performance

Demountable bellows assembly