Differential pumping stage

The ZRP100H is a differentially pumped rotary platform (RP) available in coarse, manual high precision and motorised high precision options.The ZRP100H allows for a instrumentation such as a large cryostat to be inserted and continuously rotated within the vacuum chamber without effect on the ambient chamber pressure.

SPECIFICATIONS

Sealing mechanism

Mounting flange

Differential flange

Clear bore

Maximum Load

Turbine worm gear

Resolution

Max Rotation Speed

Rotation Torque

Bakeout temperature

Leak rate

Pressure range

Seals+Two-stage differential

Dual-sided CF100-tapped holes

Two CF16

100mm

Vertical direction: 120 Kg；Horizontal direction: 20 Kg；Inverted direction: 90 Kg

1 turn = 2°

0.05°

1.0 rpm

0.3 Nm

150℃

< 1E -11 mbar*L*s-1

1E-11mbar to 1000mbar

* The data on this page is measured by Csi-Lab.