Analysis Chamber (AC)

Residual magnetic field at the sample point

Ultimate pressure

Electron energy analyzer

Mean radius of electron path

Kinetic Energy Range

Pass Energy

Energy Resolution

Angular Resolution

Lens Modes

Angular Resolved Mode

Acquisition Modes

 

 

 

 

 

 

 

Manipulator

Lowest temperature

Cryostat

Linear movement

 

 

 

Rotation

 

 

Control of manipulator

 

 

 

 

 

 

 

UV Source

Total flux

Suitable Gases

Excitation source

Monochromators

Cooling

 

 

 

 

 

 

 

Transfer chamber (TC)

Functions

 

 

 

 

 

 

 

 

Load chamber (LC)

Functions

 

 

 

 

 

 

 

 

Baking system

Vacuum control system

 

SPECIFICATIONS

Analysis Chamber

SUS316L stainless steel chamber with double μ-metal shields

≤5mGauss guaranteed;≤1mGauss achievable

≤5E-11mbar (with sufficient pumps and baking time)

R200D

200mm

0.5eV~1500eV

1~200eV, multi options

≤1.8meV FWHM@Ep=2eV,Ek=9.1eV

≤0.1°@0.1mm spot size

Transmition Mode,Angular Mode

±15°,±7°,±3.5°

Fixed Mode,Swept Mode

 

 

 

 

 

 

 

Six axes low temperature manipulator

≤6K guaranteed;≤4K achievable

Open cycle; closed cycle optional

X,Y motion range ±12.5m, Z motion range up to 600 mm;accuracy ≤ 2μm achievable

Polar rotation range ±180°(±90°for closed cycle); Azimuth rotation range ±95°;Tilt rotation range -15°to +45°;accuracy ≤ 0.05° achievable

Fully motor-driven; PLC based; PLC and PC dual interface

 

 

 

 

 

 

 

VUV430-AF-MONO

≥1E14phs/s

He, Ne, Ar, Kr, Xe......

Solid state RF generator

Toroidal grating; Double crystal monochromator

Water only

 

 

 

 

 

 

 

SUS316L stainless steel; Customized optional

Sample transfer and storage; sample annealing optional; sample cleaning with Ar+ gun optional;

 

 

 

 

 

SUS316L stainless steel; Customized optional

Sample loading, transfer and storage; direct connecting to glove box or suitcase optional

 

 

 

 

 

 

Up to 150°C

PLC based vacuum display,control and protection system

 

Manipulator

UV Source

Transfer Chamber (TC)

Load Chamber (LC)

Analysis Chamber

Data

* The data on this page is measured by Csi-Lab.