AG40S

The AG40S is an extractor type, differentially pumped ion source producing a focused, scannable ion beam of high current density.

Scannable with large scan area，up to 10 x 10mm²

Optimal focus size can reach 125μm

Can be closely coordinated with a micro-focused X-ray source to achieve multi-point XPS depth profiling measurements.

SPECIFICATIONS

Working pressure

Remote control

Working distance

Operating Gases

Kinetic Energy Range

Spot Size

Beam Current

Beam current density

Scan range

Insertion Depth

Mounting Flange

Baking temperature

10^-8 mbar- 10^-7 mbar;two DN16CF

Optional；RS485 protocol

23 mm-100 mm；Recommended 23mm

Argon

200 ~ 5000 eV，continuously adjustable

160μm guaranteed；125μm achievable

0.8μA @ 5KeV,160μm；8.0μA @ 5KeV,1000μm；

1 ~ 4 mA/cm²

10 x 10 cm²

163 mm

DN40CF

200℃

Operation

Performance

Mounting

* The data on this page is measured by Csi-Lab.